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Legacy Chillers was able to design manufacture deliver and install a highly reliable, energy efficient chiller package to a remote Hawaiian Island. The three units have been in operation for nearly 8 years in a very corrosive environment and are still running strong. Legacy Chiller is an honest, highly technically competent refrigeration design and manufacturing company who sells solutions to refrigeration challenges from simple to complex. Whether it is one off or high volume, they deliver as promised.

Richard Hill
Chairmen at Marvell Semiconductor.

As the processors that run inside popular electronic equipment such as smartphones, personal computers, servers, and industrial routers double their performance every 12-18 months, new fluid cooled test systems have entered the market. These test systems, and their extraordinary requirements for efficiency and reliability, have set the bar high for process chiller manufacturers.

Legacy manufactures the leading line of semiconductor test process chillers for brands like Hewlett Packard, Agilent, Verigy, LTX Fusion, and more.

The Legacy Chiller Systems value proposition: Each of our semi-conductor cooling chillers is specifically designed to meet the 24/7/365 demands of your semi application. Prior to shipment, each process chiller is load tested while undergoing a rigorous quality control process. Our process chiller control system provides all of the latest features the market demands. For more information on how Legacy Process Chiller products compare to many of the other chiller brands on the market have a look at our Process Chiller Buyer’s Guide, available for download.

This process chiller applies to:

Commercial and industrial process chiller applications such as data centers, semiconductor testing, custom OEM, print processes, storage tank cooling, telecommunications, welding machines, lasers – military sector, laser – private sector, plating process and injection molding.

Medical and pharmaceutical applications such as MRI magnet cooling, PET scanner cooling, CAT scanner cooling, operating room cooling, lab testing systems and induced hypothermia systems.

Food and beverage industry applications such as bakery processing, distilled spirit production, pasteurization cooling, craft brew cooling, commercial ice production and custom batch cooling.

Comment about tables below: As with many industries, technical characteristics are very dynamic, tending to change often. As such ALWAYS check with your Legacy Process Engineer prior to specifying or purchasing your process chiller. The operating conditions used to assign process chillers in the tables below are 95F ambient (Air-Cooled) and 105F condensing (or 75F entering water temp for Water-Cooled) and 50F leaving WATER ONLY temp going to the process. If your conditions vary from these industry standards, please contact Legacy Chiller Systems for an updated selection.

In the table provided below you will find our current list of process chillers for HP, Agilent, and LTX semi-conductor applications.

Air-cooled Process Chillers, Packaged, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZAT1SPZAT1S14,000 BTUH36.034.068.0550.0
PZAT1.5SPZAT1.5S18,000 BTUH36.034.068.0600.0
PZAT2SPZAT2S22,000 BTUH36.034.068.0650.0
PZAT2.5SPZAT2.5S28,800 BTUH36.034.068.0700.0
PZAT3SPZAT3S36,000 BTUH46.034.072.0800.0
PZAT4SPZAT4S49,200 BTUH46.034.072.0850.0
PZAT4.5SPZAT4.5S51,600 BTUH46.034.072.0875.0
PZAT5SPZAT5S55,200 BTUH46.034.072.0900.0
PZAT7SPZAT7S75,600 BTUH75.034.072.01100.0
PZAT8SPZAT8S84,000 BTUH75.034.072.01150.0
PZAT9SPZAT9S98,400 BTUH75.034.072.01250.0
PZAT11SPZAT11S112,400 BTUH75.034.072.01300.0

Air-cooled Process Chillers, Packaged, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZAT7DPZAT7D73,200 BTUH75.034.077.01100.0
PZAT9DPZAT9D96,000 BTUH75.034.077.01200.0
PZAT9.5DPZAT9.5D102,000 BTUH75.034.077.01250.0
PZAT10DPZAT10D108,000 BTUH75.034.077.01250.0
PZAT13DPZAT13D147,000 BTUH85.040.077.01300.0
PZAT15DPZAT15D167,000 BTUH85.040.077.01400.0
PZAT18DPZAT18D190,800 BTUH85.040.077.01450.0
PZAT22DPZAT22D264,000 BTUH75.065.077.01450.0
PZA22DPZA22D264,200 BTUH66.075.051.01150.0
PZA26DPZA26D302,000 BTUH180.046.054.02600.0
PZA35DPZA35D406,000 BTUH180.088.054.02900.0
PZA43DPZA43D500,000 BTUH180.088.054.03200.0

Water-cooled Process Chillers, Packaged, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZWT1SPZW1S12,100 BTUH36.034.064.5550.0
PZWT1.5SPZWT1.5S19,200 BTUH36.034.064.5600.0
PZWT2SPZWT2S22,200 BTUH36.034.064.5650.0
PZWT2.5SPZWT2.5S34,300 BTUH36.034.064.5700.0
PZWT3SPZWT3S40,300 BTUH36.034.064.5800.0
PZWT4SPZWT4S49,300 BTUH46.034.069.0850.0
PZWT4.5SPZWT4.5S52,000 BTUH46.034.069.0875.0
PZWT5SPZWT5S60,100 BTUH46.034.069.0900.0
PZWT7SPZWT7S78,200 BTUH46.034.065.01100.0
PZWT8SPZWT8S88,500 BTUH75.034.070.01150.0
PZWT9SPZWT9S104,000 BTUH75.034.070.01250.0
PZWT11SPZWT11S129,500 BTUH75.034.070.01300.0

Water-cooled Process Chillers, Packaged, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZWT7DPZWT7D80,600 BTUH75.034.070.01350.0
PZWT9DPZWT9D98,600 BTUH75.034.070.01400.0
PZWT9.5DPZWT9.5D104,000 BTUH75.034.070.01450.0
PZWT10DPZWT10D120,200 BTUH75.034.070.01500.0
PZWT13DPZWT13D156,400 BTUH75.034.070.01700.0
PZWT15DPZWT15D177,000 BTUH85.034.070.01800.0
PZWT18DPZWT18D208,000 BTUH85.034.070.01900.0
PZWT22DPZWT22D259,000 BTUH85.034.070.02100.0
PZW26DPZW26D326,250 BTUH85.034.059.02600.0
PZW35DPZW35D460,000 BTUH85.034.059.02900.0
PZW43DPZW43D556,000 BTUH100.034.059.03200.0

Air-cooled Process Chillers, Split-system, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
IEZAT1SIEZAT1S14,000 BTUH36.034.065.0550.0
IEZAT1.5SIEZAT1.5S18,000 BTUH36.034.065.0600.0
IEZAT2SIEZAT2S22,000 BTUH36.034.065.0650.0
IEZAT2.5SIEZAT2.5S28,800 BTUH36.034.065.0700.0
IEZAT3SIEZAT3S36,000 BTUH36.034.065.0800.0
IEZAT4SIEZAT4S49,200 BTUH46.034.068.5850.0
IEZAT4.5SIEZAT4.5S51,600 BTUH46.034.068.5875.0
IEZAT5SIEZAT5S55,200 BTUH46.034.068.5900.0
IEZAT7SIEZAT7S75,600 BTUH75.034.068.51100.0
IEZAT8SIEZAT8S84,000 BTUH75.034.070.01150.0
IEZAT9SIEZAT9S98,400 BTUH75.034.070.01250.0
IEZAT11SIEZAT11S122,400 BTUH75.034.070.01300.0

Air-cooled Process Chillers, Split-system, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
IEZAT7DIEZAT7D73,200 BTUH75.034.070.01350.0
IEZAT9DIEZAT9D96,000 BTUH75.034.070.01400.0
IEZAT9.5DIEZAT9.5D102,000 BTUH75.034.070.01450.0
IEZAT10DIEZAT10D108,000 BTUH75.034.070.01500.0
IEZAT13DIEZAT13D147,000 BTUH75.034.070.01700.0
IEZAT15DIEZAT15D167,000 BTUH75.034.070.01800.0
IEZAT18DIEZAT18D190,800 BTUH85.034.070.01900.0
IEZAT22DIEZAT22D238,800 BTUH85.034.070.02100.0
IEZA26DIEZA26D302,000 BTUH85.034.042.01500.0
IEZA35DIEZA35D406,000 BTUH85.034.042.01600.0
IEZA43DIEZA43D500,000 BTUH85.034.042.01700.0

In the table provided below you will find our current list of process chillers for Large Semi-conductor Plant & OEM Semi-conductor applications.

Air-cooled Process Chillers, Packaged, Single Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZA1SPZA1S14,200 BTUH36.034.044.0260.0
PZA1.5SPZA1.5S21,500 BTUH36.034.044.0265.0
PZA2SPZA2S24,100 BTUH36.034.044.0265.0
PZA2.5SPZA2.5S34,800 BTUH36.034.044.0295.0
PZA3SPZA3S39,200 BTUH36.034.048.0490.0
PZA4SPZA4S50,000 BTUH46.034.048.0490.0
PZA4.5SPZA4.5S54,000 BTUH46.034.048.0500.0
PZA5SPZA5S60,000 BTUH46.034.048.0500.0
PZA7SPZA7S81,000 BTUH75.034.048.0650.0
PZA8SPZA8S91,000 BTUH75.034.048.0650.0
PZA9SPZA9S106,000 BTUH75.034.048.0690.0
PZA11SPZA11S132,000 BTUH75.034.048.0875.0

Air-cooled Process Chillers, Packaged, Dual Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZA7DPZA7D80,100 BTUH75.034.048.0875.0
PZA9DPZA9D106,400 BTUH75.034.048.0900.0
PZA9.5DPZA9.5D111,800 BTUH75.034.048.0950.0
PZA10DPZA10D118,000 BTUH75.034.048.0950.0
PZA13DPZA13D160,000 BTUH85.040.049.0985.0
PZA15DPZA15D183,500 BTUH85.040.049.01000.0
PZA18DPZA18D209,200 BTUH85.040.049.01100.0
PZA22DPZA22D264,200 BTUH66.075.051.01150.0
PZA26DPZA26D302,000 BTUH180.046.054.02600.0
PZA35DPZA35D406,000 BTUH180.088.054.02900.0
PZA43DPZA43D500,000 BTUH180.088.054.03200.0
PZA52DPZA52D612,000 BTUH180.088.054.04000.0

Air-cooled Process Chillers, Packaged, Dual Stage Semi-hermetic, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight Inches
PSA16DPSA16D188,400 BTUH180.045.055.0
PSA19DPSA19D222,000 BTUH180.045.055.0
PSA22DPSA22D265,200 BTUH180.045.055.0
PSA25DPSA25D300,000 BTUH232.045.055.0
PSA33DPSA33D392,400 BTUH180.089.055.0
PSA37DPSA37D446,400 BTUH180.089.055.0
PSA45DPSA45D550,000 BTUH180.089.055.0
PSA55DPSA55D652,000 BTUH232.089.057.0
PSA62DPSA62D740,000 BTUH232.089.057.0
PSA71DPSA71D856,000 BTUH232.089.057.0
PSA88DPSA88D1,054,000 BTUH232.089.057.0

Air-cooled Process Chillers, Split-system, Dual Stage Semi-hermetic, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight Inches
IESA16DIESA16D188,400 BTUH85.034.045.0
IESA19DPDF222,000 BTUH85.034.045.0
IESA22DPDF265,200 BTUH85.034.062.0
IESA25DPDF300,000 BTUH85.034.062.0
IESA33DPDF392,400 BTUH85.034.062.0
IESA37DPDF446,400 BTUH85.034.062.0
IESA45DPDF550,000 BTUH110.034.062.0
IESA55DPDF652,000 BTUH110.034.062.0
IESA62DPDF740,000 BTUH110.034.062.0
IESA71DPDF856,000 BTUH120.034.068.0
IESA88DPDF1,054,000 BTUH120.034.068.0

Water-cooled Process Chillers, Packaged, Single Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZW1SPZW1S12,700 BTUH36.034.036.0260.0
PZW1.5SPZW1.5S20,100 BTUH36.034.036.0265.0
PZW2SPZW2S23,300 BTUH36.034.036.0265.0
PZW2.5SPZW2.5S35,799 BTUH36.034.036.0295.0
PZW3SPZW3S42,100 BTUH36.034.036.0490.0
PZW4SPZW4S51,500 BTUH46.034.036.0490.0
PZW4.5SPZW4.5S53,500 BTUH46.034.036.0500.0
PZW5SPZW5S62,700 BTUH46.034.036.0500.0
PZW7SPZW7S81,600 BTUH46.034.036.0650.0
PZW8SPZW8S92,400 BTUH46.034.036.0650.0
PZW9SPZW9S108,500 BTUH46.034.036.0690.0
PZW11SPZW11S138,500 BTUH46.034.036.0750.0

Water-cooled Process Chillers, Packaged, Dual Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZW7DPZW7D84,200 BTUH65.034.036.0875.0
PZW9DPZW9D103,000 BTUH65.034.036.0900.0
PZW9.5DPZW9.5D107,000 BTUH65.034.036.0950.0
PZW10DPZW10D125,400 BTUH65.034.036.0950.0
PZW13DPZW13D163,200 BTUH75.034.036.0985.0
PZW15DPZW15D184,800 BTUH75.034.036.01000.0
PZW18DPZW18D217,000 BTUH75.034.036.01000.0
PZW22DPZW22D277,000 BTUH75.034.036.01150.0
PZW26DPZW26D326,250 BTUH85.034.059.02600.0
PZW35DPZW35D460,000 BTUH85.034.059.02900.0
PZW43DPZW43D556,000 BTUH100.034.059.03200.0
PZW52DPZW52D633,000 BTUH100.034.059.04000.0

Water-cooled Process Chillers, Packaged, Dual Stage Semi-hermetic, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PSW16DPSW16D210,000 BTUH85.034.070.01240.0
PSW19DPDF249,000 BTUH85.034.070.01320.0
PSW22DPDF308,000 BTUH85.034.075.01410.0
PSW25DPDF320,000 BTUH85.034.075.01790.0
PSW33DPDF422,000 BTUH85.034.075.01960.0
PSW37DPDF484,000 BTUH85.034.075.02120.0
PSW45DPDF600,000 BTUH110.034.075.02240.0
PSW55DPDF694,000 BTUH110.034.075.02490.0
PSW62DPDF866,000 BTUH110.034.075.02870.0
PSW71DPDF936,000 BTUH120.034.078.03355.0
PSW88DPDF1,128,000 BTUH120.034.078.03815.0